Inner tube for use in a semiconductor wafer heat processing apparatus



FIG. 1 a perspective view of an inner tube for use in a semiconductorwafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof; and,

FIG. 4 a cross-sectional view taken along line IV--IV in FIG. 3.

I claim the ornamental design for inner tube for use in a semiconductorwafer heat processing apparatus, as shown and described.